Statistical characterization of fatigue lifetime of polysilicon thin films
Vu Le Huy, Joao Gaspar, Oliver Paul, Shoji KamiyaVolume:
179
Year:
2012
Language:
english
Pages:
12
DOI:
10.1016/j.sna.2012.03.011
File:
PDF, 1.89 MB
english, 2012