Controlling the growth of nanocrystalline silicon by tuning...

Controlling the growth of nanocrystalline silicon by tuning negative substrate bias

Debnath Raha, Debajyoti Das
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Volume:
95
Year:
2011
Language:
english
Pages:
8
DOI:
10.1016/j.solmat.2011.06.048
File:
PDF, 1.11 MB
english, 2011
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