Two-dimensional carrier mapping at the nanometer-scale on 32 nm node targeted p-MOSFETs using high vacuum scanning spreading resistance microscopy
Pierre Eyben, Trudo Clarysse, Jay Mody, Aftab Nazir, Andreas Schulze, Thomas Hantschel, Wilfried VandervorstVolume:
71
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.sse.2011.10.023
File:
PDF, 978 KB
english, 2012