Thorough study of the local structure of LiPON thin films to better understand the influence of a solder-reflow type thermal treatment on their performances
B. Fleutot, B. Pecquenard, H. Martinez, A. LevasseurVolume:
206
Year:
2012
Language:
english
Pages:
6
DOI:
10.1016/j.ssi.2011.11.009
File:
PDF, 694 KB
english, 2012