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Studies of hysteresis effect in reactive HiPIMS deposition of oxides
T. Kubart, M. Aiempanakit, J. Andersson, T. Nyberg, S. Berg, U. HelmerssonVolume:
205
Year:
2011
Language:
english
Pages:
1
DOI:
10.1016/j.surfcoat.2011.01.019
File:
PDF, 478 KB
english, 2011