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Study of hybrid PVD–PECVD process of Ti sputtering in argon and acetylene
Tereza Schmidtová, Pavel Souček, Petr Vašina, Jan SchäferVolume:
205
Year:
2011
Language:
english
Pages:
1
DOI:
10.1016/j.surfcoat.2011.02.047
File:
PDF, 507 KB
english, 2011