Expanding microwave plasma process for thin molybdenum...

Surface and Coatings Technology 2011 Vol. 205; Iss. supp-S2

Expanding microwave plasma process for thin molybdenum films nitriding: Nitrogen diffusion and structure investigations

Isabelle Jauberteau, Thérèse Merle-Méjean, Saïd Touimi, Sylvain Weber, Annie Bessaudou, Armand Passelergue, Jean Louis Jauberteau, Jacques Aubreton
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Volume:
205
Year:
2011
Language:
english
Pages:
1
DOI:
10.1016/j.surfcoat.2011.03.056
File:
PDF, 553 KB
english, 2011
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