Properties of hydrogenated amorphous carbon films deposited by PECVD and modified by SF6 plasma
N.M.S. Marins, R.P. Mota, R.Y. Honda, P.A.P. Nascente, M.E. Kayama, K.G. Kostov, M.A. Algatti, N.C. Cruz, E.C. RangelVolume:
206
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2011.06.058
File:
PDF, 851 KB
english, 2011