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Modeling reactive sputter deposition of titanium nitride in a triode magnetron sputtering system
J.C. Sagás, D.A. Duarte, D.R. Irala, L.C. Fontana, T.R. RosaVolume:
206
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2011.07.013
File:
PDF, 1020 KB
english, 2011