CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings
C. Czettl, C. Mitterer, U. Mühle, D. Rafaja, S. Puchner, H. Hutter, M. Penoy, C. Michotte, M. KathreinVolume:
206
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.surfcoat.2011.07.086
File:
PDF, 1.46 MB
english, 2011