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Hydrogen quantification of magnetron sputtered hydrogenated amorphous carbon (a-C:H) coatings produced at various bias voltages and their tribological behavior under different humidity levels
W. Tillmann, F. Hoffmann, S. Momeni, R. HellerVolume:
206
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2011.07.089
File:
PDF, 942 KB
english, 2011