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Surface modification of NiTi/PZT heterostructure thin films using various protective layers for potential MEMS applications
Nitin Choudhary, D.K. Kharat, Davinder KaurVolume:
206
Year:
2011
Language:
english
Pages:
9
DOI:
10.1016/j.surfcoat.2011.08.056
File:
PDF, 2.46 MB
english, 2011