Deposition of cobalt oxide thin films by plasma-enhanced chemical vapour deposition (PECVD) for catalytic applications
C. Guyon, A. Barkallah, F. Rousseau, K. Giffard, D. Morvan, M. TatoulianVolume:
206
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.surfcoat.2011.09.060
File:
PDF, 1.65 MB
english, 2011