Synthesis of hydrogenated amorphous carbon films with a line type atmospheric-pressure plasma CVD apparatus
Masaki Agemi, Kotaro Kayama, Mayui Noborisaka, Yohei Tachimoto, Akira Shirakura, Tetsuya SuzukiVolume:
206
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2011.10.002
File:
PDF, 680 KB
english, 2011