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Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films
K. Sarakinos, A. Braun, C. Zilkens, S. Mráz, J.M. Schneider, H. Zoubos, P. PatsalasVolume:
206
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2011.11.032
File:
PDF, 527 KB
english, 2012