Effect of mid-frequency discharge assistance on dual-high...

Surface and Coatings Technology 2012 Vol. 206; Iss. 11-12

Effect of mid-frequency discharge assistance on dual-high power impulse magnetron sputtering

Vitezslav Stranak, Steffen Drache, Robert Bogdanowicz, Harm Wulff, Ann-Pierra Herrendorf, Zdenek Hubicka, Martin Cada, Milan Tichy, Rainer Hippler
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Volume:
206
Year:
2012
Language:
english
Pages:
9
DOI:
10.1016/j.surfcoat.2011.11.043
File:
PDF, 6.14 MB
english, 2012
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