Effect of small concentrations of oxygen and nitrogen on the structure and mechanical properties of sputtered titanium films
S. Firstov, V. Kulikovsky, T. Rogul, R. CtvrtlikVolume:
206
Year:
2012
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2012.02.039
File:
PDF, 1.01 MB
english, 2012