Pulse management in high power pulsed magnetron sputtering of niobium
M. Hála, J. Čapek, O. Zabeida, J.E. Klemberg-Sapieha, L. MartinuVolume:
206
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.surfcoat.2012.04.019
File:
PDF, 1.20 MB
english, 2012