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Deformation and flying height orbit of glass sheets on aerostatic porous bearing guides
Naoki Oiwa, Masaya Masuda, Tomoko Hirayama, Takashi Matsuoka, Hiroshi YabeVolume:
48
Year:
2012
Language:
english
Pages:
6
DOI:
10.1016/j.triboint.2011.08.014
File:
PDF, 815 KB
english, 2012