PECVD of hydrogenated silicon thin films from SiH4+H2+Si2H6...

PECVD of hydrogenated silicon thin films from SiH4+H2+Si2H6 mixtures

A. Hammad, E. Amanatides, D. Mataras, D. Rapakoulias
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Volume:
451-452
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2003.10.123
File:
PDF, 94 KB
english, 2004
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