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Compositional and thickness distribution of carbon nitride films grown by PLD in the target plane
Zs. Geretovszky, T. SzörényiVolume:
453-454
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2003.11.097
File:
PDF, 86 KB
english, 2004