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Comparison of growth rate and surface structure of carbon nitride films, pulsed laser deposited in parallel, on axis planes
T. Szörényi, Zs. GeretovszkyVolume:
453-454
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2003.11.121
File:
PDF, 488 KB
english, 2004