Comparison of growth rate and surface structure of carbon...

Comparison of growth rate and surface structure of carbon nitride films, pulsed laser deposited in parallel, on axis planes

T. Szörényi, Zs. Geretovszky
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Volume:
453-454
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2003.11.121
File:
PDF, 488 KB
english, 2004
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