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Gas immersion laser doping (GILD) for ultra-shallow junction formation
G. Kerrien, T. Sarnet, D. Débarre, J. Boulmer, M. Hernandez, C. Laviron, M.-N. SemeriaVolume:
453-454
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2003.11.151
File:
PDF, 536 KB
english, 2004