Microstructuring of glassy carbon: comparison of laser...

Thin Solid Films 2004 Vol. 453-454; Iss. none

Microstructuring of glassy carbon: comparison of laser machining and reactive ion etching

M Kuhnke, Th Lippert, E Ortelli, G.G Scherer, A Wokaun
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Volume:
453-454
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2003.11.156
File:
PDF, 1.38 MB
english, 2004
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