Etch characteristics of FePt magnetic thin films using...

Etch characteristics of FePt magnetic thin films using inductively coupled plasma reactive ion etching

Eun Ho Kim, Yu Bin Xiao, Seon Mi Kong, Chee Won Chung
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
519
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2011.03.098
File:
PDF, 751 KB
english, 2011
Conversion to is in progress
Conversion to is failed