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Etch characteristics of FePt magnetic thin films using inductively coupled plasma reactive ion etching
Eun Ho Kim, Yu Bin Xiao, Seon Mi Kong, Chee Won ChungVolume:
519
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2011.03.098
File:
PDF, 751 KB
english, 2011