High-rate deposition of Sb-doped SnO2 films by reactive...

Thin Solid Films 2011 Vol. 520; Iss. 4

High-rate deposition of Sb-doped SnO2 films by reactive sputtering using the impedance control method

Yu Muto, Nobuto Oka, Naoki Tsukamoto, Yoshinori Iwabuchi, Hidefumi Kotsubo, Yuzo Shigesato
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Volume:
520
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.04.151
File:
PDF, 1.16 MB
english, 2011
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