Tribological behavior of radio-frequency sputtering WS2...

Tribological behavior of radio-frequency sputtering WS2 thin films with vacuum annealing

G.Y. Du, D.C. Ba, Z. Tan, K. Liu
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Volume:
520
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.04.195
File:
PDF, 742 KB
english, 2011
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