Growth of highly textured aluminum films on LiTaO3 with...

Thin Solid Films 2011 Vol. 519; Iss. 22

Growth of highly textured aluminum films on LiTaO3 with optimized titanium intermediate layers

R. Nüssl, C. Senft, D. Beckmeier, T. Jewula, W. Ruile, T. Sulima, W. Hansch, I. Eisele
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Volume:
519
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2011.04.235
File:
PDF, 2.11 MB
english, 2011
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