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Microstructure analysis of Ag films deposited by low-voltage sputtering
Kazuhiro Kato, Hideo Omoto, Atsushi TakamatsuVolume:
520
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.06.051
File:
PDF, 1.01 MB
english, 2012