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Si1 − xGex metal-oxide-semiconductor capacitors with HfTaOx gate dielectrics
S. Mallik, C. Mahata, M.K. Hota, C.K. Sarkar, C.K. MaitiVolume:
520
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.06.057
File:
PDF, 849 KB
english, 2011