High-rate deposition of high-quality Sn-doped In2O3 films...

Thin Solid Films 2012 Vol. 520; Iss. 12

High-rate deposition of high-quality Sn-doped In2O3 films by reactive magnetron sputtering using alloy targets

Nobuto Oka, Yukari Kawase, Yuzo Shigesato
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Volume:
520
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.06.063
File:
PDF, 923 KB
english, 2012
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