Improve silane utilization for silicon thin film deposition...

Improve silane utilization for silicon thin film deposition at high rate

Shengzhi Xu, Xiaodan Zhang, Yang Li, Shaozhen Xiong, Xinhua Geng, Ying Zhao
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Volume:
520
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2011.06.069
File:
PDF, 307 KB
english, 2011
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