Patterning of porous silicon nanostructures and eliminating microcracks on silicon nitride mask using metal assisted chemical etching
Mohammad Zahedinejad, Mahdi khaje, Alireza Erfanian, Farshid Raissi, Hamed Mehrara, Farshad RezvaniVolume:
520
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.07.007
File:
PDF, 970 KB
english, 2012