Substrate temperature dependence of electrical and...

Thin Solid Films 2011 Vol. 520; Iss. 1

Substrate temperature dependence of electrical and structural properties of Ru films

Takatoshi Nagano, Kazuya Inokuchi, Kunihiro Tamahashi, Nobuhiro Ishikawa, Yasushi Sasajima, Jin Onuki
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Volume:
520
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2011.07.046
File:
PDF, 1.06 MB
english, 2011
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