Effect of Si/Fe ratio on the boron and phosphorus doping...

Thin Solid Films 2011 Vol. 520; Iss. 1

Effect of Si/Fe ratio on the boron and phosphorus doping efficiency of β-FeSi2 by magnetron sputtering

Jiaxiong Xu, Ruohe Yao
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Volume:
520
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.07.047
File:
PDF, 389 KB
english, 2011
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