Carbon nanotube integrated 3-dimensional carbon...

Thin Solid Films 2011 Vol. 520; Iss. 3

Carbon nanotube integrated 3-dimensional carbon microelectrode array by modified SU-8 photoresist photolithography and pyrolysis

Lei Zhang, Tielin Shi, Shuang Xi, Dan Liu, Zirong Tang, Xiaoping Li, Wuxing Lai
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Volume:
520
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2011.07.055
File:
PDF, 1.63 MB
english, 2011
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