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Effect of annealing temperature on the microstructure and photoluminescence of low resistivity Si/SiN/TaN thin films using magnetron sputtering
C.K. Chung, T.S. Chen, N.W. Chang, M.W. Liao, C.T. LeeVolume:
520
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.07.061
File:
PDF, 368 KB
english, 2011