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Mechanical characterization of LiPON films using nanoindentation
E.G. Herbert, W.E. Tenhaeff, N.J. Dudney, G.M. PharrVolume:
520
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2011.07.068
File:
PDF, 813 KB
english, 2011