Electrical activation in boron doped polycrystalline Si formed by sequential lateral solidification
Won-Eui Hong, Deok Hoi Kim, Chi Woo Kim, Jae-Sang RoVolume:
520
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2011.08.018
File:
PDF, 873 KB
english, 2011