Applicability of X-ray fluorescence spectroscopy as method to determine thickness and composition of stacks of metal thin films: A comparison with imaging and profilometry
J.A.M. Vrielink, R.M. Tiggelaar, J.G.E. Gardeniers, L. LeffertsVolume:
520
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.08.049
File:
PDF, 368 KB
english, 2012