An effective fabrication method for ultra thin aluminum...

Thin Solid Films 2012 Vol. 520; Iss. 6

An effective fabrication method for ultra thin aluminum structures

N.J. de Jager, W.J. Perold, U. Büttner
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Volume:
520
Year:
2012
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2011.08.062
File:
PDF, 587 KB
english, 2012
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