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Deposition rate characteristics for steady state high power impulse magnetron sputtering (HIPIMS) discharges generated with a modulated pulsed power (MPP) generator
F. Papa, H. Gerdes, R. Bandorf, A.P. Ehiasarian, I. Kolev, G. Braeuer, R. Tietema, T. KrugVolume:
520
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.09.004
File:
PDF, 669 KB
english, 2011