Deposition rate characteristics for steady state high power...

Deposition rate characteristics for steady state high power impulse magnetron sputtering (HIPIMS) discharges generated with a modulated pulsed power (MPP) generator

F. Papa, H. Gerdes, R. Bandorf, A.P. Ehiasarian, I. Kolev, G. Braeuer, R. Tietema, T. Krug
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
520
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.09.004
File:
PDF, 669 KB
english, 2011
Conversion to is in progress
Conversion to is failed