The effect of de-ionized water rinsing after immersion in hydrofluoric acid on the electrical conductivity of silicon nanomembranes
Xiang-Fu Zhao, Ping Han, Qiang GuoVolume:
520
Year:
2012
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2011.09.051
File:
PDF, 361 KB
english, 2012