Rotatable magnetron sputtering of aluminium in continuous...

Thin Solid Films 2011 Vol. 520; Iss. 5

Rotatable magnetron sputtering of aluminium in continuous and high power pulse modes using different strength magnetic arrays

Martynas Audronis, Victor Bellido-Gonzalez, Robert Brown
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Volume:
520
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.10.042
File:
PDF, 884 KB
english, 2011
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