Low threading dislocation Ge on Si by combining deposition...

Thin Solid Films 2012 Vol. 520; Iss. 8

Low threading dislocation Ge on Si by combining deposition and etching

Yuji Yamamoto, Grzegorz Kozlowski, Peter Zaumseil, Bernd Tillack
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Volume:
520
Year:
2012
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2011.10.095
File:
PDF, 1.15 MB
english, 2012
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