Faceting and nanostructure effects in Si and SiGe epitaxy

Thin Solid Films 2012 Vol. 520; Iss. 8

Faceting and nanostructure effects in Si and SiGe epitaxy

Didier Dutartre, Birgit Seiss, Yves Campidelli, Denis Pellissier-Tanon, David Barge, Roland Pantel
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Volume:
520
Year:
2012
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2011.10.115
File:
PDF, 1.74 MB
english, 2012
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