Low-temperature Ge and GeSn Chemical Vapor Deposition using...

Thin Solid Films 2012 Vol. 520; Iss. 8

Low-temperature Ge and GeSn Chemical Vapor Deposition using Ge2H6

F. Gencarelli, B. Vincent, L. Souriau, O. Richard, W. Vandervorst, R. Loo, M. Caymax, M. Heyns
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Volume:
520
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.10.119
File:
PDF, 1.01 MB
english, 2012
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