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CexAlyOz/TiN stack analysis for Metal–Insulator–Metal applications: Effect of annealing and the metal electrode deposition method
C. Baristiran Kaynak, M. Lukosius, B. Tillack, Ch. Wenger, A. Abrutis, M. SkapasVolume:
520
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.10.135
File:
PDF, 1006 KB
english, 2012