Atomic layer deposition grown composite dielectric oxides...

Thin Solid Films 2012 Vol. 520; Iss. 14

Atomic layer deposition grown composite dielectric oxides and ZnO for transparent electronic applications

S. Gieraltowska, L. Wachnicki, B.S. Witkowski, M. Godlewski, E. Guziewicz
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Volume:
520
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.10.151
File:
PDF, 523 KB
english, 2012
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