Gas phase particle formation and elimination on Si (100) in...

Gas phase particle formation and elimination on Si (100) in low temperature reduced pressure chemical vapor deposition silicon-based epitaxial layers

Manabu Shinriki, Keith Chung, Satoshi Hasaka, Paul Brabant, Hong He, Thomas N. Adam, Devendra Sadana
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
520
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.10.165
File:
PDF, 2.37 MB
english, 2012
Conversion to is in progress
Conversion to is failed