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Gas phase particle formation and elimination on Si (100) in low temperature reduced pressure chemical vapor deposition silicon-based epitaxial layers
Manabu Shinriki, Keith Chung, Satoshi Hasaka, Paul Brabant, Hong He, Thomas N. Adam, Devendra SadanaVolume:
520
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.10.165
File:
PDF, 2.37 MB
english, 2012